Print Email Facebook Twitter Design and Modeling of Decoupled and Tunable Bandwidth (40-330 Hz) MEMS Vibratory Gyroscopes Title Design and Modeling of Decoupled and Tunable Bandwidth (40-330 Hz) MEMS Vibratory Gyroscopes Author Sabageh, I. Contributor Rajaraman, V. (mentor) Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Programme Electronic Instrumentation Date 2010-08-26 Abstract This thesis reports on the design and modeling of decoupled and tunable bandwidth MEMS vibratory gyroscopes that were designed for the medical applications of tremor compensation and micro-surgical tool navigation. Two different designs are presented. The first design is a dual mass de-coupled gyroscope that consists of a drive and sense mass implemented in a drive frame architecture. The device achieves a theoretical maximum resolution of 0.01 deg/s and a maximum sensitivity of 5.247 F/deg/s. However, this design is prone to quadrature error that drastically reduces the sensitivity of the device and completely destroys its performance. The second design is a three-mass doubly-decoupled gyroscope that consists of a drive, Coriolis and sense mass and is designed to overcome the sensitivity of the dual mass de-coupled gyroscope to quadrature error. The three-frame structure of this gyroscope, with an outer sensing frame, leads to an improved electrical sensitivity over conventional architectures. It leads to a full decoupling between the sense and drive modes that makes the device robust against quadrature error and eliminates the cross axis sensitivity that usually limits the angular rate sensing performance. The device achieves a theoretical maximum resolution of 0.006 deg/s and a maximum sensitivity of 1.255 F/deg/s. Optimizing this design based on the DVA principle leads to a 60 % reduction in the size of the Coriolis mass, resulting in a 37 % increase in the resolution and an 19 % increase in the sensitivity. The drive and sense mode resonance frequencies of the designs are 2500 Hz and 2830 Hz respectively, with an input angular rate bandwidth tunable between 40Hz and 330Hz. Both COMSOL finite element simulations and macro models implemented in Agilent ADS were used to validate the structures. Subject Inertial Sensors To reference this document use: http://resolver.tudelft.nl/uuid:8cf7095f-9e7f-485c-a9a0-8597cba830eb Embargo date 2014-12-01 Part of collection Student theses Document type master thesis Rights (c) 2010 Sabageh, I. Files PDF Design_and_Modeling_of_De ... scopes.pdf 8.87 MB Close viewer /islandora/object/uuid:8cf7095f-9e7f-485c-a9a0-8597cba830eb/datastream/OBJ/view