Reliability of micromechanical thin-film resonators

Title

Reliability of micromechanical thin-film resonators

Author

Kazinczi, R.

Contributor

French, P.J. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

2002-02-18

To reference this document use:

http://resolver.tudelft.nl/uuid:8ed60661-cbb2-4c31-8127-c0ba58f56a57

Publisher

Eburon

ISBN

90-5166-891-0

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 2002 R. Kazinczi