PECVD silicon carbide: A structural material for surface micromachined devices

Title

PECVD silicon carbide: A structural material for surface micromachined devices

Author

Pham, H.T.M.

Contributor

Sarro, P.M. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

2004-12-07

Subject

Silicon carbide material
surface micromachining
post-processing
micro-electromechanical systems

To reference this document use:

http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7

ISBN

90-9018856-8

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 2004 H.T.M. Pham