Print Email Facebook Twitter Nano Optomechanical Read-out for Microcantilever Sensors Title Nano Optomechanical Read-out for Microcantilever Sensors Author Liu, Y. Contributor Lina Sarro, P.M. (mentor) Hamed Marnani, S. (mentor) Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics & Computer Engineering Programme ETCM Date 2014-12-11 Abstract This thesis demonstrates a novel displacement sensor with photonic structure a micro ring resonator with a micro cantilever. This device uses the working principle of micro ring resonator and transfer the mechanical signal into optical signal. The goal of this project is to design, fabricate and measure such a device. Fabrication process is not so complex, but as processing at chip level introduces additional complexity as not all machines can handle small pieces, several problems needed to be settled and most time was spent on fabrication, this is discussed in detail. This new design should have a same sensitivity as the micro ring resonator. Subject micro ring resonatorcantileverfabrication To reference this document use: http://resolver.tudelft.nl/uuid:96b2b55c-59c4-40da-b98b-396e5b8f2740 Part of collection Student theses Document type master thesis Rights (c) 2014 Liu, Y. Files PDF Final_thesis_v3.pdf 2.61 MB Close viewer /islandora/object/uuid:96b2b55c-59c4-40da-b98b-396e5b8f2740/datastream/OBJ/view