Aberration retrieval for high-NA optical systems using the Extended Nijboer-Zernike theory

Title

Aberration retrieval for high-NA optical systems using the Extended Nijboer-Zernike theory

Author

Dirksen, P.
Braat, J.J.M.
Janssen, A.J.E.M.
Leeuwesteijn, A.

Faculty

Applied Sciences

Department

Imaging Science and Technology

Date

2005-05-12

Subject

optical lithography
high NA
vectorial diffraction formalism
point-spread function
Extended Nijboer-Zernike theory

To reference this document use:

http://resolver.tudelft.nl/uuid:9b17f08c-0748-4175-b4b4-2365304ae004

Publisher

SPIE

ISSN

0277-786X

Source

Proceedings of SPIE, 2004 vol. 5754

Part of collection

Institutional Repository

Document type

conference paper

Rights

(c)2004 Dirksen, P., Braat, J.J.M., Janssen, A.J.E.M., Leeuwestein, A.