Plasma planarization for sensor applications

Title

Plasma planarization for sensor applications

Author

Li, Y.X.
French, P.J.
Wolffenbuttel, R.F.

Date

1995

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http://resolver.tudelft.nl/uuid:9cccf1f6-9c60-4d2e-a879-2862111cb29e

Publisher

IEEE

ISSN

1057-7157

Source

Journal of Microelectromechanical Systems, 4 (3)

Part of collection

Institutional Repository

Document type

journal article

Rights

(c) 1995 Li, Y.X.; French, P.J.; Wolffenbuttel, R.F.