Apparatus and method for inspecting a surface of a sample

Title

Apparatus and method for inspecting a surface of a sample

 Author

Kruit, P.

Faculty

Applied Sciences

 Department

ImPhys/Imaging Physics

 Date

2014-05-01

 Abstract

The invention relates to an apparatus and method for inspecting a sample. The apparatus comprises a generator for generating an array of primary charged particle beams (33), and a charged particle optical system with an optical axis (38). The optical system comprises a first lens system (37, 310) for focusing all primary beams (33) into a first array of spots in an intermediate plane, and a second lens system (313, 314) for focusing all primary beams (33) into a second array of spots on the sample surface (315). The apparatus comprises a position sensitive backscattered charged particle detector (311) positioned at or near the intermediate plane. The second lens system comprises an electromagnetic or electrostatic lens which is common for all charged particle beams. Preferably the second lens system comprises a magnetic lens for rotating the array of primary beams (33) around the optical axis (38) to position the second array of charged particle spots with respect to the first array at an angle.

 To reference this document use:

http://resolver.tudelft.nl/uuid:9d31a85c-aadf-4a68-b273-415627686cf0

 Publisher

European Patent Office

 Source

http://worldwide.espacenet.com/publicationDetails/biblio?CC=WO&NR=2014065663A1&KC=A1&FT=D&ND=3&date=20140501&DB=EPODOC&locale=en_EP

 Source

WO 201465663 (A1)

 Part of collection

Institutional Repository

 Document type

patent

 Rights

(c) 2014 The Author(s)
Files
PDF WO2014065663A1.pdf 1.5 MB
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