Nanofabrication with a High Resolution Helium Ion Beam

Title

Nanofabrication with a High Resolution Helium Ion Beam

Author

Van Veldhoven, E.
Sidorkin, V.
Chen, P.
Alkemade, P.
Van der Drift, E.
Salemink, H.
Zandbergen, H.
Maas, D.

Faculty

Applied Sciences

Department

Quantum Nanoscience

Date

2010-08-01

To reference this document use:

http://resolver.tudelft.nl/uuid:9f809337-43c9-49e6-8c82-aff8e57c3686

DOI

https://doi.org/10.1017/S1431927610063270

Publisher

Cambridge University Press

Embargo date

2011-09-30

ISSN

1431-9276

Source

Microscopy and Microanalysis, 16 (supplement 2), 2010

Part of collection

Institutional Repository

Document type

journal article

Rights

(c) 2010 Microscopy Society of America