Integrated silicon flow sensors

Title

Integrated silicon flow sensors

Author

van Oudheusden, B.W.

Contributor

Middelhoek, S. (promotor)
van Ingen, J.L. (promotor)
Huijsing, J.H. (promotor)

Faculty

Aerospace Engineering

Date

1989-11-30

Subject

fluid flow measurements
gas flow measurement

To reference this document use:

http://resolver.tudelft.nl/uuid:a1127a0e-f813-4049-9667-aa9badd3d203

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 1989 B.W. van Oudheusden