Print Email Facebook Twitter Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology Title Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology Author Romijn, J. (TU Delft Electronic Components, Technology and Materials) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) May, Alexander (Fraunhofer Institute for Integrated Systems and Devices Technology IISB) Erlbacher, Tobias (Fraunhofer Institute for Integrated Systems and Devices Technology IISB) van Zeijl, H.W. (TU Delft Electronic Components, Technology and Materials) Leijtens, J.A.P. (Lens R&D BV) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials) Date 2022 Abstract In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of the photodetectors and CMOS readout circuitry on-chip is vital to compete with the performance of silicon state-of-the-art and for the concept to be adopted by industry, which is where previous implementations of visible blind sun sensors are lacking. Subject 4H-SiCsilicon carbidesun position sensorsUV photodetectorswide bandgap semiconductors To reference this document use: http://resolver.tudelft.nl/uuid:a3219085-f9cb-4f16-9ff0-82f3f5315018 DOI https://doi.org/10.1109/MEMS51670.2022.9699533 Publisher IEEE, Danvers Embargo date 2022-08-11 ISBN 978-1-6654-0912-4 Source Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Event 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022-01-09 → 2022-01-13, Hybrid at Tokyo, Japan Bibliographical note Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2022 J. Romijn, S. Vollebregt, Alexander May, Tobias Erlbacher, H.W. van Zeijl, J.A.P. Leijtens, Kouchi Zhang, Pasqualina M Sarro Files PDF Visible_Blind_Quadrant_Su ... nology.pdf 1.26 MB Close viewer /islandora/object/uuid:a3219085-f9cb-4f16-9ff0-82f3f5315018/datastream/OBJ/view