Aluminum Nitride and Chromium Nitride Thin Films for Strain Gauge Application

Title

Aluminum Nitride and Chromium Nitride Thin Films for Strain Gauge Application

Author

Hou, Y.

Contributor

Sarro, P.M. (mentor)
Mol, H.A. (mentor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics & Computer Engineering

Programme

Microelectronics

Date

2010-07-19

Subject

strain gauge
chromium nitride
aluminum nitride

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Part of collection

Student theses

Document type

master thesis

Rights

(c) 2010 Hou, Y.