Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI

Title

Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI

 Author

Ngana, P.J.

Contributor

Koning, J.J. (mentor)
French, P.J. (mentor)

Faculty

Electrical Engineering, Mathematics and Computer Science

 Department

Microelectronics & Computer Engineering

 Date

2009-08-24

 Abstract

In this thesis , a simulation model of a MEMS gyroscope is presented. The model enables mode matching and analysis of the dynamic behavior of a gyroscope. Furthermore, the model allows the optimization the design parameters of the gyroscope. The simulated gyroscope operates at a frequency of 52MHz with amplitudes of 10nm and quality factor of 50,000. Finally, the drive mode measurements are presented at different bias voltages.

 Subject

MEMS Gyroscope
Simulation
Mechanical Sensor

 To reference this document use:

http://resolver.tudelft.nl/uuid:a6324bce-a3e7-4563-b8e8-2d3b43db837f

 Part of collection

Student theses

 Document type

master thesis

 Rights

(c) 2009 Ngana, P.J.
Files
PDF Design_Modeling_and_Simul ... um_SOI.pdf 4.75 MB
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