Print Email Facebook Twitter Tiles CMUT dies with pitch uniformity Title Tiles CMUT dies with pitch uniformity Author Sudol, W. Dirksen, P. Henneken, V.A. Dekker, R. Louwerse, M.C. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2016-01-21 Abstract A large aperture CMUT transducer array is formed of a plurality of adjacently located tiles of CMUT cells. The adjacent edges of the tiles are formed by an anisotropic etch process, preferably a deep reactive ion etching process which is capable of cutting through the die and its substrate while maintaining vertical edges in close proximity to the CMUT cells at the edge of the tile. This enables the CMUT cells of continuous rows or columns to exhibit a constant pitch over multiple CMUT cell tiles. The tiles also contain interconnect electrodes along an edge for making electrical connections to the tiles with flex circuit. To reference this document use: http://resolver.tudelft.nl/uuid:a69d56c1-99e9-4af4-8038-820a6b64870a Publisher European Patent Office Source http://worldwide.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=10&ND=3&adjacent=true&locale=en_EP&FT=D&date=20160121&CC=WO&NR=2016008833A1&KC=A1 Source WO 2016008833 (A1) Part of collection Institutional Repository Document type patent Rights (c) 2016 The Author(s) Files PDF WO2016008833A1.pdf 1.29 MB Close viewer /islandora/object/uuid:a69d56c1-99e9-4af4-8038-820a6b64870a/datastream/OBJ/view