Print Email Facebook Twitter An energy-efficient readout circuit for resonant sensors based on ring-down measurement Title An energy-efficient readout circuit for resonant sensors based on ring-down measurement Author Zeng, Z. Pertijs, M.A.P. Karabacak, D.M. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2013-02-25 Abstract This paper presents an energy-efficient readout circuit for resonant sensors that operates based on a transient measurement method. The resonant sensor is driven at a frequency close to its resonance frequency by an excitation source that can be intermittently disconnected, causing the sensor to oscillate at its resonance frequency with exponentially decaying amplitude. By counting the zero crossings of this ring-down response, the interface circuit can detect the resonance frequency. In contrast with oscillator-based readout, the presented readout circuit is readily able to detect quality factor (Q) of the resonator from the envelope of the ring-down response, and can be used even in the presence of large parasitic capacitors. A prototype of the readout circuit has been integrated in 0.35 ?m CMOS technology, and consumes only 36 ?A from a 3.3 V supply during a measurement time of 2 ms. The resonance frequency and quality factor of a micro-machined SiN resonator obtained using this prototype are in good agreement with results obtained using impedance analysis. Furthermore, a clear transient response is observed to ethanol flow using the presented readout, demonstrating the use of this technique in sensing applications. Subject capacitorsCMOS integrated circuitsdigital readoutenergy conservationmicromachiningmicromechanical resonatorsmicrosensorsoscillatorsQ-factorsilicon compoundstransient response To reference this document use: http://resolver.tudelft.nl/uuid:a9d5115f-23e6-4aa1-9d4c-0def9dc7d966 DOI https://doi.org/10.1063/1.4792396 Publisher American Institute of Physics ISSN 0034-6748 Source https://doi.org/10.1063/1.4792396 Source Review of Scientific Instruments, 84 (2), 2013 Part of collection Institutional Repository Document type journal article Rights © 2013 American Institute of Physics Files PDF Zeng_2013.pdf 1.51 MB Close viewer /islandora/object/uuid:a9d5115f-23e6-4aa1-9d4c-0def9dc7d966/datastream/OBJ/view