Print Email Facebook Twitter Method and apparatus for the formation of nanometer-scale electrodes, and such electrodes Title Method and apparatus for the formation of nanometer-scale electrodes, and such electrodes Author Zandbergen, H.W. Tichelaar, F.D. Alkemade, P.F.A. Faculty Applied Sciences Date 2006-02-09 Abstract A method for the formation of nanometer-scale electrodes, wherein strip of electrically conductive material, in particular metal, is provided with a longitudinal direction, a width direction and a thickness direction and then, with the aid of an electron beam, a groove is provided in a top surface of the strip, in the width direction of the strip, with a nanometer- scale width in the longitudinal direction of the strip To reference this document use: http://resolver.tudelft.nl/uuid:abb48c21-2041-4886-8982-1fd2878c8414 Publisher European Patent Office Source WO 2006025737 (A1) Is part of http://v3.espacenet.com/publicationDetails/biblio?adjacent=true&locale=en_EP&FT=D&date=20060309&CC=WO&NR=2006025737A1&KC=A1 Part of collection Institutional Repository Document type patent Rights (c) 2006 The Author(s) Files PDF WO2006025737A1.pdf 1.65 MB Close viewer /islandora/object/uuid:abb48c21-2041-4886-8982-1fd2878c8414/datastream/OBJ/view