Print Email Facebook Twitter A Flexible 32x32 SPAD Image Sensor with Integrated Microlenses Title A Flexible 32x32 SPAD Image Sensor with Integrated Microlenses Author Sun, P. Charbon, E. Ishihara, R. Faculty Electrical Engineering, Mathematics and Computer Science Department Quantum Engineering Date 2015-12-31 Abstract The first single-photon avalanche diode (SPAD) image sensor fully integrated on flexible substrate is reported. The design consists of an array of 1024 quenched pixels with CMOS readout and addressing circuitries. The flexible substrate was made compatible with sol-gel polymer, which will be used to imprint microlenses by quartz mold to improve fill factor. The SPAD pixel can operate both in frontside- (FSI) and backside-illumination (BSI) with similar peak photon detection probability (PDP) of 13%. The dark count rate (DCR) could be drastically reduced at a cryogenic temperature. Afterpulsing and cross-talk are negligible at the dead time. To reference this document use: http://resolver.tudelft.nl/uuid:abb54b11-f017-49ca-9305-aad8b951044d Publisher International Image Sensor Society Source Proceedings of the International Image Sensor Workshop, IISW 2015, Vaals, The Netherlands, June 8-11, 2015 Part of collection Institutional Repository Document type conference paper Rights (c) 2015 The Author(s) Files PDF 329333.pdf 798.81 KB Close viewer /islandora/object/uuid:abb54b11-f017-49ca-9305-aad8b951044d/datastream/OBJ/view