Print Email Facebook Twitter Molecular Dynamics Simulation on Mechanical behavior of Si Nano Cantilever under Ar Bombarding Title Molecular Dynamics Simulation on Mechanical behavior of Si Nano Cantilever under Ar Bombarding Author Hao, S. Contributor Thijsse, B.J. (mentor) Sadeghian Marnani, H. (mentor) Faculty Mechanical, Maritime and Materials Engineering Department Material Science & Engineering Programme Material Science & Engineering Date 2014-09-01 Abstract In nano world, it is cheap and repeatable to make 2-dimensional structures, such as nanoholes and thin nanofilms. However, it is expensive to build 3-dimensional structure in a repeatable manner. Ion bombard- ment is a technique which is widely applied in engineering areas, such as thin film deposition, etching, and analysis. In this thesis work, classical molecular dynamics is used to study the mechanical behavior of silicon cantilever under neutral Ar bombardment. Initially, a single crystal silicon cantilever is set in a simulation box using molecular dynamics simulation. Thermal vibration of the cantilever without any bombardment is studied using Euler-Bernoulli model. Then the cantilever is bombarded under neutral Ar atoms, with different bombarding energy and bombarding angle. The results shown that Ar bombardment can make significant plastic deformation (around 6 nm) comparing with the thickness of the cantilever (1.5 nm). The low energy bombardment, with its high efficiency and quite low sputtering, is potentially to be applied for 3D nano architecture of Si. Subject nanotechnologymolecular dynamics simulationnano fabrication3D nano architecture To reference this document use: http://resolver.tudelft.nl/uuid:afb1f22a-226c-4a61-946c-085fe8d5348b Part of collection Student theses Document type master thesis Rights (c) 2014 Hao, S. Files PDF thesisreport_Hao_Su.pdf 3.4 MB Close viewer /islandora/object/uuid:afb1f22a-226c-4a61-946c-085fe8d5348b/datastream/OBJ/view