Molecular Dynamics Simulation on Mechanical behavior of Si Nano Cantilever under Ar Bombarding

Molecular Dynamics Simulation on Mechanical behavior of Si Nano Cantilever under Ar Bombarding

Hao, S.

Thijsse, B.J. (mentor)
Sadeghian Marnani, H. (mentor)

Mechanical, Maritime and Materials Engineering

Material Science & Engineering

Material Science & Engineering

2014-09-01

In nano world, it is cheap and repeatable to make 2-dimensional structures, such as nanoholes and thin nanofilms. However, it is expensive to build 3-dimensional structure in a repeatable manner. Ion bombard- ment is a technique which is widely applied in engineering areas, such as thin film deposition, etching, and analysis. In this thesis work, classical molecular dynamics is used to study the mechanical behavior of silicon cantilever under neutral Ar bombardment. Initially, a single crystal silicon cantilever is set in a simulation box using molecular dynamics simulation. Thermal vibration of the cantilever without any bombardment is studied using Euler-Bernoulli model. Then the cantilever is bombarded under neutral Ar atoms, with different bombarding energy and bombarding angle. The results shown that Ar bombardment can make significant plastic deformation (around 6 nm) comparing with the thickness of the cantilever (1.5 nm). The low energy bombardment, with its high efficiency and quite low sputtering, is potentially to be applied for 3D nano architecture of Si.

nanotechnology
molecular dynamics simulation
nano fabrication
3D nano architecture

http://resolver.tudelft.nl/uuid:afb1f22a-226c-4a61-946c-085fe8d5348b

Student theses

master thesis

(c) 2014 Hao, S.