Simulation for stability of a beam-mass based high-resolution MEMS gravimeter

Simulation for stability of a beam-mass based high-resolution MEMS gravimeter

Ye, Guigen (China University of Petroleum (East China))
Fan, X. (TU Delft Electronic Components, Technology and Materials; Lamar University)
Middelburg, L.M. (TU Delft Electronic Components, Technology and Materials)
el Mansouri, B. (TU Delft Electronic Components, Technology and Materials)
Poelma, René H. (TU Delft Electronic Components, Technology and Materials)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)

2022

In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based on a prototyped MEMS device, the nonlinear finite element model was validated first against the experimental results. Then, we demonstrated three different scenarios in design that have three distinct modes of deformation: the mode with buckling (case 1), the mode without buckling but with a single zero-stiffness point (case 2), and the mode without both buckling and zero-stiffness point (case 3). Both case 1 and case 2 presented an unstable and sensitive region, in which a tiny perturbation could result in a rapid increase of the resonance frequency. Case 3, on the other hand, could provide a stable and low resonance frequency with a linear relationship between the displacement and gravitational acceleration. An optimized design of a beam/spring-mass-based relative gravimeter could be achieved using the above guidelines.

Bucking
Microelectromechanical systems (MEMS)
Non-linear finite element analysis
Relative gravimeter
Stability
Zero-stiffness

http://resolver.tudelft.nl/uuid:b226e0af-31ca-4cc0-b9db-bf2c4902e83b

https://doi.org/10.1016/j.matdes.2022.110788

0264-1275

Materials & Design, 219

Institutional Repository

journal article

© 2022 Guigen Ye, X. Fan, L.M. Middelburg, B. el Mansouri, René H. Poelma, Kouchi Zhang