Actuator System for the Flowerbed

Title

Actuator System for the Flowerbed

 Author

Jansen, Roy (TU Delft Mechanical, Maritime and Materials Engineering)

Contributor

van Ostayen, Ron (mentor)
Herder, Just (graduation committee)
Goosen, Hans (graduation committee)

Degree granting institution

Delft University of Technology

 Date

2018-07-10

 Abstract

In the electronics industry there is a trend towards the handling of larger and thinner sheets of silicon, for the production of wafers and solar cells. The flowerbed is a contact-less handler for these fragile substrates based on air bearing technology. By levitating the substrate on a film of pressurized air, mechanical contact is avoided and the risk of damage is decreased. The flowerbed is designed for precise positioning of a wafer. Theoretically wafers can be controlled up to a very high bandwidth. In reality, the flowerbed structure suffers from resonances that limit the control bandwidth and positioning precision. This project focuses on redesigning the actuation system to improve the bandwidth. For this purpose, a 3 degree of freedom compliant mechanism with integrated Lorentz type actuators has been designed and produced. Using conventional PID control the bandwidth has been more than doubled.

 Subject

mechatronics
Air bearing
Contactless positioning
compliant mechanism
flexure
Semiconductor industry

 To reference this document use:

http://resolver.tudelft.nl/uuid:b4a3a5da-c512-40ed-b631-cf2d6e638ce6

 Embargo date

2020-07-10

 Part of collection

Student theses

 Document type

master thesis

 Rights

© 2018 Roy Jansen
Files
PDF Thesis_RoyJansen_final_digital.pdf 15.92 MB
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