Print Email Facebook Twitter Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory Title Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory Author Van Haver, S. Braat, J.J.M. Pereira, S.F. Faculty Applied Sciences Department Optics Research Groep Date 2010-12-31 Abstract We propose a measurement approach that allows the determination of aberrations of a microlens by analyzing the through-focus intensity image it produces when the object is a point source. To simulate image formation by a microlens we apply the extended version of the Nijboer-Zernike diffraction theory (ENZ) that uses the Debye diffraction integral to compute the image point-spread function. Due to the aperture size of the microlens and the finite dimensions of the pixels of the electronic detector the Debye diffraction integral should be adapted according to the Li-Wolf scaling rules to yield correct results. In addition to this we also discuss the experimental requirements posed by this characterization approach and derive from this a suitable experimental setup. Subject diffraction, point-spread function, Rayleigh integral, Debye integral, microlens, characterization,aberration retrieval To reference this document use: http://resolver.tudelft.nl/uuid:bd36b749-7c75-46a6-8d4a-28e13d59eff6 DOI https://doi.org/10.1117/12.854412 Publisher SPIE ISSN 0277-786X Source Proceedings of SPIE, 2010 vol. 7717 Part of collection Institutional Repository Document type conference paper Rights (c)2010 Van Haver, S.; Braat, J.J.M.; Pereira, S.F. Files PDF 7717VanHaver.pdf 7.16 MB Close viewer /islandora/object/uuid:bd36b749-7c75-46a6-8d4a-28e13d59eff6/datastream/OBJ/view