Print Email Facebook Twitter Bi-stability of micro-plates Title Bi-stability of micro-plates: A sensitive mechanism for differential pressure measurements Author Sajadi, B. (TU Delft Computational Design and Mechanics) Goosen, J.F.L. (TU Delft Computational Design and Mechanics) van Keulen, A. (TU Delft Computational Design and Mechanics) Date 2017 Abstract The electrostatic instability (pull-in) of a flat electrode in a parallel plate capacitor has been shown to be highly sensitive to external mechanical loads such as pressure. In this paper, we substantiate the possibility of prompting additional unstable configurations in such a system, with a remarkable sensitivity to the applied pressure. This additional instability has significant advantageous properties for sensing purposes. In addition to the high sensitivity and robustness of the pull-in voltage measurements, it can be adjusted so that after the unstable configuration is met, a snap-through to a new stable configuration occurs. As a result of this bi-stable behavior, the contact between the electrodes, which is the main drawback of pull-in phenomena, will be easily avoided. The results of this paper particularly suggest the suitability of this mechanism for two different methods of pressure measurements. Subject ElectrostaticsThermodynamicsChemical compositionElastic moduliAdsorption To reference this document use: http://resolver.tudelft.nl/uuid:c056f0f0-033b-4d8b-b08f-d9a575b58f9f DOI https://doi.org/10.1063/1.5003223 Embargo date 2018-09-01 ISSN 0003-6951 Source Applied Physics Letters, 111 (12) Part of collection Institutional Repository Document type journal article Rights © 2017 B. Sajadi, J.F.L. Goosen, A. van Keulen Files PDF 1.5003223.pdf 815.95 KB Close viewer /islandora/object/uuid:c056f0f0-033b-4d8b-b08f-d9a575b58f9f/datastream/OBJ/view