Print Email Facebook Twitter Graphene based piezoresistive pressure sensor Title Graphene based piezoresistive pressure sensor Author Zhu, S.E. Ghatkesar, M.K. Zhang, C. Janssen, G.C.A.M. Faculty Mechanical, Maritime and Materials Engineering Department Precision and Microsystems Engineering Date 2013-04-23 Abstract We present a pressure sensor based on the piezoresistive effect of graphene. The sensor is a 100?nm thick, 280??m wide square silicon nitride membrane with graphene meander patterns located on the maximum strain area. The multilayer, polycrystalline graphene was obtained by chemical vapor deposition. Strain in graphene was generated by applying differential pressure across the membrane. Finite element simulation was used to analyze the strain distribution. By performing electromechanical measurements, we obtained a gauge factor of ?1.6 for graphene and a dynamic range from 0?mbar to 700?mbar for the pressure sensor. Subject chemical vapour depositionfinite element analysisgraphenepiezoresistive devicespressure sensorssilicon compounds To reference this document use: http://resolver.tudelft.nl/uuid:c05a3d36-2ad9-4833-9920-e27bd39d4ee9 DOI https://doi.org/10.1063/1.4802799 Publisher American Institute of Physics ISSN 0003-6951 Source https://doi.org/10.1063/1.4802799 Source Applied Physics Letters, 102 (16), 2013 Part of collection Institutional Repository Document type journal article Rights © 2013 AIP Publishing LLC Files PDF Zhu_2013.pdf 854.96 KB Close viewer /islandora/object/uuid:c05a3d36-2ad9-4833-9920-e27bd39d4ee9/datastream/OBJ/view