Print Email Facebook Twitter Experimental Investigation of Adhesion and Friction Phenomena of Ultrananocrystalline Diamond (UNCD) and Aluminum Oxide in MEMS Title Experimental Investigation of Adhesion and Friction Phenomena of Ultrananocrystalline Diamond (UNCD) and Aluminum Oxide in MEMS Author Buja, F. Contributor Staufer, U. (promotor) Faculty Mechanical, Maritime and Materials Engineering Department Micro and Nano Engineering Date 2015-09-15 Abstract This thesis aims to provide the latest progresses on the experimental investigation of friction and adhesion phenomena, occurring at the nanoscale in microelectromechanical systems (MEMS). I have studied and characterized the interaction between MEMS sidewalls in contact and sliding one onto another. Ultrananocrystalline diamond (UNCD) and aluminum oxide have been tested and utilized for the fabrication and integration process in MEMS micro-tribotesters. The results of this research are new in the field of nanotribology, and interesting for the development of micro-devices that can allow sliding surfaces in their operations. Subject MEMSUNCDtribologyadhesionfrictiondiamond To reference this document use: https://doi.org/10.4233/uuid:c700e976-e79e-4e7c-9210-95e90796d108 Embargo date 2015-12-03 ISBN 978-94-6186-527-4 Part of collection Institutional Repository Document type doctoral thesis Rights (c) 2015 Buja, F. Files PDF Thesis_final_version_to_print1.pdf 206.15 MB Close viewer /islandora/object/uuid:c700e976-e79e-4e7c-9210-95e90796d108/datastream/OBJ/view