Print Email Facebook Twitter General imaging of advanced 3D mask objects based on the fully-vectorial Extended Nijboer-Zernike (ENZ) theory Title General imaging of advanced 3D mask objects based on the fully-vectorial Extended Nijboer-Zernike (ENZ) theory Author Van Haver, S. Janssen, O.T.A. Braat, J.J.M. Janssen, A.J.E.M. Urbach, H.P. Pereira, S.F. Faculty Applied Sciences Department ?IST-Optics Research Groep Date 2008-04-09 Abstract In this paper we introduce a new mask imaging algorithm that is based on the source point integration method (or Abbe method). The method presented here distinguishes itself from existing methods by exploiting the through-focus imaging feature of the Extended Nijboer-Zernike (ENZ) theory of diffraction. An introduction to ENZ-theory and its application in general imaging is provided after which we describe the mask imaging scheme that can be derived from it. The remainder of the paper is devoted to illustrating the advantages of the new method over existing methods (Hopkins-based). To this extent several simulation results are included that illustrate advantages arising from: the accurate incorporation of isolated structures, the rigorous treatment of the object (mask topography) and the fully vectorial through-focus image formation of the ENZ-based algorithm. Subject mask imagingExtended Nijboer-Zernike (EZN)mask topography effectsAbbe methodvectorialnon-periodic objectsFDTD To reference this document use: http://resolver.tudelft.nl/uuid:c79b87fb-e3af-4d5f-9f66-764632ff985f Publisher SPIE ISSN 0277-786X Source Proceedings of SPIE, 2008 vol. 6924 Part of collection Institutional Repository Document type conference paper Rights (c) 2008 Van haver, S., Janssen, O.T.A., Braat, J.J.M., Janssen, A.J.E.M., Urbach, H.P., Pereira, S.F. Files PDF GeneralHaver2008.pdf 885.18 KB Close viewer /islandora/object/uuid:c79b87fb-e3af-4d5f-9f66-764632ff985f/datastream/OBJ/view