Print Email Facebook Twitter Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist Title Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist Author Ushakova, K. Van den Berg, Q.Y. Pereira, S.F. Urbach, H.P. Faculty Applied Sciences Department ImPhys/Imaging Physics Date 2015-11-11 Abstract Spot size reduction is demonstrated by printing focused spots from amplitude-modulated radially polarized light at the wavelength ? = 405 nm on a photoresist. Amplitude modulation is realized by ring illumination and by application of an optimized amplitude distribution function. Amplitude modulation is implemented via spatial light modulator, which is followed by a specially designed radial wire grid polarizer to obtain high-quality radially polarized light. Comparison between full and amplitude modulated apertures of the written focused spots on a photoresist is performed. Rigorous simulations based on the Richards-Wolf integral are made to confirm experimental data. Subject lithographyfocussed radially polarized lightamplitude modulationnear UV light To reference this document use: http://resolver.tudelft.nl/uuid:ca25b8e0-48c6-49e9-9899-d274539da973 DOI https://doi.org/10.1088/2040-8978/17/12/125615 Publisher IOP Publishing ISSN 2040-8978 Source Journal of Optics, 17, 2015 Part of collection Institutional Repository Document type journal article Rights (c)2015 The AuthorsPublished under de terms of the Creative Commons Attribution 3.0 licence Files PDF Demonstration.pdf 1.25 MB Close viewer /islandora/object/uuid:ca25b8e0-48c6-49e9-9899-d274539da973/datastream/OBJ/view