Non-linear bulk micromachined accelerometer for high sensitivity applications

Non-linear bulk micromachined accelerometer for high sensitivity applications

Middelburg, L.M. (TU Delft Electronic Components, Technology and Materials)
el Mansouri, B. (TU Delft Electronic Components, Technology and Materials)
Poelma, René H. (TU Delft Electronic Components, Technology and Materials)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)
van Zeijl, H.W. (TU Delft Electronic Components, Technology and Materials)
Wei, J. (TU Delft Else Kooi Laboratory; TU Delft EKL Processing)

Roy, A. (editor)
Gianchandani, Y. (editor)

Else Kooi Laboratory

2018

This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.

accelerometer
large displacement behaviour
non-linear MEMS
optical readout

http://resolver.tudelft.nl/uuid:cb60696d-11f4-4e07-adc4-2aca485f3b87

https://doi.org/10.1109/ICSENS.2018.8589630

IEEE, Piscataway, NJ

978-1-5386-4708-0

2018 IEEE SENSORS Proceedings, 2018-October

IEEE Sensors 2018, 2018-10-28 → 2018-10-31, Pullman Aerocity, New Delhi, India

Accepted author manuscript

Institutional Repository

conference paper

© 2018 L.M. Middelburg, B. el Mansouri, René H. Poelma, Kouchi Zhang, H.W. van Zeijl, J. Wei