Experimental setup for dynamic analysis of microand nano-mechanical systems in vacuum, gas, and liquid

Experimental setup for dynamic analysis of microand nano-mechanical systems in vacuum, gas, and liquid

van den Brink, Bram (Student TU Delft)
Alijani, F. (TU Delft Dynamics of Micro and Nano Systems)
Ghatkesar, M.K. (TU Delft Micro and Nano Engineering)

2019

An experimental setup to perform dynamic analysis of a micro- and nano-mechanical system in vacuum, gas, and liquid is presented. The setup mainly consists of a piezoelectric excitation part and the chamber that can be either evacuated for vacuum, or filled with gas or water. The design of the piezoelectric actuator was based on a Langevin transducer. The chamber is made out of materials that can sustain: vacuum, variety of gases and different types of liquids (mild acids, alkalies, common alcohols and oils). All the experiments were performed on commercial cantilevers used for contact and tapping mode Atomic Force Microscopy (AFM) with stiffness 0.2 N/m and 48 N/m, respectively, in vacuum, air and water. The performance of the setup was evaluated by comparing the measured actuator response to a finite element model. The frequency responses of the two AFM cantilevers measured were compared to analytical equations. A vacuum level of 0.6 mbar was obtained. The setup has a bandwidth of 10-550 kHz in vacuum and air, and a bandwidth of 50-550 kHz in liquid. The dynamic responses of the cantilevers show good agreement with theory in all media.

AFM
Atomic force microscopy
Dynamics
Experimental modal analysis
Fluid
Liquid
Micro-cantilevers
Microsystems
Modal testing
Vacuum
Vibration
Vibration analysis

http://resolver.tudelft.nl/uuid:cb6cfc37-1c3b-4297-a22b-a847e295061e

https://doi.org/10.3390/mi10030162

2072-666X

Micromachines, 10 (3)

Institutional Repository

journal article

© 2019 Bram van den Brink, F. Alijani, M.K. Ghatkesar