Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

Title

Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

 Author

Khosropanah, P (SRON Netherlands Institute for Space Research)
Suzuki, T. (Nagoya University)
Ridder, M. L. (SRON Netherlands Institute for Space Research)
Hijmering, R. A. (SRON Netherlands Institute for Space Research)
Akamatsu, H. (SRON Netherlands Institute for Space Research)
Gottardi, L (SRON Netherlands Institute for Space Research)
Van Der Kuur, J. (SRON Netherlands Institute for Space Research)
Gao, J.R. (TU Delft QN/Gao Lab; SRON Netherlands Institute for Space Research)
Jackson, B. D. (SRON Netherlands Institute for Space Research)

Date

2016

 Abstract

SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.


 Subject

Far infrared spectrometer
SAFARI
SiN membrane
SPICA
TES arrays
Transition edge sensor

 To reference this document use:

http://resolver.tudelft.nl/uuid:cdefbe12-add8-4762-adb1-a4ba1941afc1

 DOI

https://doi.org/10.1117/12.2233472

 Publisher

SPIE

 ISBN

978-151060207-6

 Source

Proceedings of SPIE: Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII, 9914

 Event

Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII, 2016-06-28 → 2016-07-01, Edinburgh, United Kingdom

 Part of collection

Institutional Repository

 Document type

conference paper

 Rights

© 2016 P Khosropanah, T. Suzuki, M. L. Ridder, R. A. Hijmering, H. Akamatsu, L Gottardi, J. Van Der Kuur, J.R. Gao, B. D. Jackson
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