Silicon Micromachining for RF Technology

Title

Silicon Micromachining for RF Technology

Author

Pham, P.N.

Contributor

Burghartz, J.N. (promotor)
Sarro, P.M. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

2003-05-06

Subject

silicon micromachining
RF
lithography
3-D integration

To reference this document use:

http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515

ISBN

90-6734-235-1

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 2003 P.N. Pham