Sealing graphene nanodrums

Sealing graphene nanodrums

Lee, M. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)
Davidovikj, D. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft)
Sajadi, B. (TU Delft Dynamics of Micro and Nano Systems)
Siskins, M. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)
Alijani, F. (TU Delft Dynamics of Micro and Nano Systems)
van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft)
Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)

2019

Despite theoretical predictions that graphene should be impermeable to all gases, practical experiments on sealed graphene nanodrums show small leak rates. Thus far, the exact mechanism for this permeation has remained unclear, because different potential leakage pathways have not been studied separately. Here, we demonstrate a sealing method that consists of depositing SiO₂ across the edge of suspended multilayer graphene flakes using electron beam-induced deposition. By sealing, leakage along the graphene-SiO₂ interface is blocked, which is observed to result in a reduction in permeation rate by a factor of 10⁴. The experiments thus demonstrate that gas flow along the graphene-SiO₂ interface tends to dominate the leak rate in unsealed graphene nanodrums. Moreover, the presented sealing method enables the study of intrinsic gas leakage through graphene membranes and can enable hermetic graphene membranes for pressure sensing applications.

electron beam induced deposition (EBID)
graphene
membrane
permeability
pressure sensor
sealing

http://resolver.tudelft.nl/uuid:d50c5be5-1661-4ed7-9f8b-fce164c2af2c

https://doi.org/10.1021/acs.nanolett.9b01770

1530-6984

Nano Letters: a journal dedicated to nanoscience and nanotechnology, 19 (8), 5313-5318

Institutional Repository

journal article

© 2019 M. Lee, D. Davidovikj, B. Sajadi, M. Siskins, F. Alijani, H.S.J. van der Zant, P.G. Steeneken