Print Email Facebook Twitter High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2 Title High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2 Author Cartamil Bueno, S.J. Steeneken, P.G. Tichelaar, F.D. Navarro Moratalla, E. Venstra, W.J. Leeuwen, R. Coronado, E. Van der Zant, H.S.J. Steele, G.A. Castellanos-Gomez, A. Faculty Applied Sciences Department QN/Quantum Nanoscience Date 2015-07-24 Abstract Controlling the strain in two-dimensional (2D) materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here, we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by the laser oxidation of nano-drumhead resonators composed of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichalcogenides. Before the study of their mechanical properties with a laser interferometer, we verified the oxidation and crystallinity of the freely suspended tantalum oxide using high-resolution electron microscopy. We demonstrate that the stress of tantalum oxide resonators increases by 140 MPa (with respect to pristine TaSe2 resonators), which causes an enhancement in the quality factor (14 times larger) and resonance frequency (9 times larger) of these resonators. Subject TaSe2tantalum oxidemechanical resonatorslaser oxidationoptical interferometerhigh quality factor To reference this document use: http://resolver.tudelft.nl/uuid:d5faa7f5-3ada-49d4-9443-1067847c1292 Publisher Springer ISSN 1998-0124 Source https://doi.org/10.1007/s12274-015-0789-8 Source Nano Research, 8 (9), 2015 Part of collection Institutional Repository Document type journal article Rights © 2015 Tsinghua University Press and Springer-Verlag Files PDF 320822.pdf 1.64 MB Close viewer /islandora/object/uuid:d5faa7f5-3ada-49d4-9443-1067847c1292/datastream/OBJ/view