Print Email Facebook Twitter A Complete Overview on Realizing Transfer-free Graphene-based Differential Pressure Sensor Title A Complete Overview on Realizing Transfer-free Graphene-based Differential Pressure Sensor Author Ramesha, Raghutham (TU Delft Electrical Engineering, Mathematics and Computer Science) Contributor Vollebregt, S. (mentor) Sarro, Pasqualina M (graduation committee) Steeneken, P.G. (graduation committee) Degree granting institution Delft University of Technology Programme Electrical Engineering Date 2019-09-20 Abstract Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this work we employed a novel, transfer-free bulk-micromachining approach to realize graphene-based differential pressure sensors. The devices were successfully fabricated, and the samples were examined under Raman Spectroscopy, and electrically characterized. Further, pressure dependent measurements were performed for a dynamic range of 0 to 80 kPa of differential pressure and the corresponding change in resistance of the membrane was measured. The fabricated devices have a mean Gauge Factor of 2.80. Subject GraphenePressure Sensorbulk micromachiningMEMS To reference this document use: http://resolver.tudelft.nl/uuid:d8ffb5c3-6a25-401c-8594-70a80fc92190 Part of collection Student theses Document type master thesis Rights © 2019 Raghutham Ramesha Files PDF R_Ramesha_2019_Graphene_final.pdf 18.27 MB Close viewer /islandora/object/uuid:d8ffb5c3-6a25-401c-8594-70a80fc92190/datastream/OBJ/view