Print Email Facebook Twitter Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates Title Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates Author Bruno, A. De Lange, G. Asaad, S. Van der Enden, K.L. Langford, N.K. DiCarlo, L. Faculty Applied Sciences Department QN/Quantum Nanoscience Date 2015-05-04 Abstract We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1?M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate surface treatment prior to NbTiN deposition to optimize the metal-substrate interface and deep reactive-ion etching of the substrate to displace the substrate-vacuum interfaces away from high electric fields. The temperature and power dependence of resonator behavior indicate that two-level systems still contribute significantly to energy dissipation, suggesting that more interface optimization could further improve performance. Subject etchingoptical resonatorssiliconsurface dynamicsmetal surfaces To reference this document use: http://resolver.tudelft.nl/uuid:dae6e982-4b3d-432c-953f-8c086c6dcadf Publisher American Institute of Physics ISSN 0003-6951 Source https://doi.org/10.1063/1.4919761 Source Applied Physics Letters, 106 (18), 2015 Part of collection Institutional Repository Document type journal article Rights (c) 2015 AIP Files PDF Bruno_2015.pdf 419.3 KB Close viewer /islandora/object/uuid:dae6e982-4b3d-432c-953f-8c086c6dcadf/datastream/OBJ/view