Print Email Facebook Twitter Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask Title Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask Author Konijnenberg, A.P. (TU Delft ImPhys/Optics) Lu, Xingyuan (Soochow University) Liu, Leixin (Soochow University) Coene, W.M.J.M. (TU Delft ImPhys/Optics; ASML) Zhao, C.L. (Soochow University) Urbach, Paul (TU Delft ImPhys/Optics) Date 2018 Abstract A novel non-iterative phase retrieval method is proposed and demonstrated with aproof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization. Subject OA-Fund TU Delft To reference this document use: http://resolver.tudelft.nl/uuid:dd7a8a26-22cf-49e4-a184-7763af323651 DOI https://doi.org/10.1364/OE.26.009332 ISSN 1094-4087 Source Optics Express, 26 (7), 9332 - 9343 Part of collection Institutional Repository Document type journal article Rights © 2018 A.P. Konijnenberg, Xingyuan Lu, Leixin Liu, W.M.J.M. Coene, C.L. Zhao, Paul Urbach Files PDF oe_26_7_9332.pdf 3.72 MB Close viewer /islandora/object/uuid:dd7a8a26-22cf-49e4-a184-7763af323651/datastream/OBJ/view