IC-compatible microspectrometer using a planar imaging diffraction grating.

IC-compatible microspectrometer using a planar imaging diffraction grating.

Grabarnik, S.
Emadi, A.
Wu, H.
De Graaf, G.
Vdovin, G.
Wolffenbutter, R.F.

Electrical Engineering, Mathematics and Computer Science

Electronic Instrumentation Laboratory

2008-05-29

The design and performance of a highly miniaturized spectrometer fabricated using MEMS technologies are reported in this paper. Operation is based on an imaging diffraction grating. Minimizing fabrication complexity and assembly of the micromachined optical and electronic parts of the microspectrometer implies a planar design. It consists of two parallel glass plates, which contain all spectrograph components, including slit and diffraction grating, and can be fabricated on a single glass wafer with standard lithography. A simple analytical model for determining spectral resolution from device dimensions was developed and used for finding the optimal parameters of a miniaturized spectrometer as a compromise between size and spectral resolution. The fabricated spectrometer is very compact (11 x 1.5 x 3 mm3), which allowed mounting directly on top of an image sensor. The realized spectrometer features a 6 nm spectral resolution over a 100 nm operating range from 600 nm to 700 nm, which was tested using a Ne light source.

microspectrometer
planar diffraction grating
imaging grating

http://resolver.tudelft.nl/uuid:e011f80d-5c5a-49b6-9a46-a096bb197ae6

SPIE

Proceedings of SPIE, 2008 vol. 6992

Institutional Repository

conference paper

(c) 2008 Grabarnik, S., Emadi, A., Wu, H., De Graaf, G., Vdovin, G., Wolffenbuttel, R.F.