Integrated optical-readout of a high-Q mechanical out-of-plane mode

Integrated optical-readout of a high-Q mechanical out-of-plane mode

Guo, J. (TU Delft QN/Groeblacher Lab; Kavli institute of nanoscience Delft)
Groeblacher, S. (TU Delft QN/Groeblacher Lab; Kavli institute of nanoscience Delft)

2022

The rapid development of high-Q_M macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-Q_M structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here, we present a versatile fabrication method, which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-Q_M fundamental out-of-plane mode, separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode, enabling strong optomechanical interaction strengths. Furthermore, we implement a novel photonic crystal design, which allows for a very large cavity photon number, a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally, it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-Q_M out-of-plane modes alike.

OA-Fund TU Delft

http://resolver.tudelft.nl/uuid:e083b6b6-4873-4ddb-aed3-2bf86d44c391

https://doi.org/10.1038/s41377-022-00966-7

2095-5545

Light: Science & Applications (online), 11 (1)

Institutional Repository

journal article

© 2022 J. Guo, S. Groeblacher