Print Email Facebook Twitter Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1 Title Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1 Author Ren, Y. (TU Delft ImPhys/Charged Particle Optics) Contributor Kruit, P. (promotor) Degree granting institution Delft University of Technology Date 2017-10-09 Abstract The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter. Subject Multi-beam SEM (MBSEM)Transmission electron imagingSecondary electron imaging To reference this document use: https://doi.org/10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11 ISBN 9789462957114 Part of collection Institutional Repository Document type doctoral thesis Rights © 2017 Y. Ren Files PDF Yan_Ren_Thesis_20170912.pdf 8.37 MB Close viewer /islandora/object/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11/datastream/OBJ/view