Print Email Facebook Twitter Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology Title Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology Author Deng, R. (TU Delft Mechatronic Systems Design) Contributor Munnig Schmidt, R.H. (promotor) Spronck, J.W. (copromotor) Degree granting institution Delft University of Technology Date 2017-09-11 To reference this document use: https://doi.org/10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8 ISBN 978-94-6186-833-6 Part of collection Institutional Repository Document type doctoral thesis Rights © 2017 R. Deng Files PDF thesis.pdf 29.81 MB Close viewer /islandora/object/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8/datastream/OBJ/view