Static capacitive pressure sensing using a single graphene drumg

Static capacitive pressure sensing using a single graphene drumg

Davidovikj, D. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)
Scheepers, P.H. (TU Delft EKL-Users; Kavli institute of nanoscience Delft)
van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft)
Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)

2017

To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using an external pressure load, we demonstrate the successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.

graphene drum
minimizing parasitic capacitance
nanomechanics
pressure sensor
static capacitive readout
two-dimensional materials

http://resolver.tudelft.nl/uuid:eda80864-cdf3-4f30-a61e-81f3f704974c

https://doi.org/10.1021/acsami.7b17487

2018-11-22

1944-8244

ACS applied materials & interfaces, 9 (49), 43205-43210

Accepted Author Manuscript

Institutional Repository

journal article

© 2017 D. Davidovikj, P.H. Scheepers, H.S.J. van der Zant, P.G. Steeneken