Print Email Facebook Twitter A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry Title A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry Author Liu, C. Emadi, A. Wu, H. De Graaf, G. Wolffenbuttel, R.F. Faculty Electrical Engineering, Mathematics and Computer Science Department Department of ME/EI Date 2010-05-07 Abstract A linear array of 128 Active Pixel Sensors has been developed in standard CMOS technology and a Linear Variable Optical Filter (LVOF) is added using CMOS-compatible post-process, resulting in a single chip highly-integrated highresolution microspectrometer. The optical requirements imposed by the LVOF result in photodetectors with small pitch and large length in the direction normal to the dispersed spectrum (7.2?m×300?m). The specific characteristics of the readout are the small pitch, low optical signals (typically a photocurrent of 100fA~1pA) and a much longer integration time as compared to regular video (typically 100?s~63s). These characteristics enable a very different trade-off between SNR and integration time and IC-compatibility. The system discussed in this paper operates in the visible part of the spectrum. The prototype is fabricated in the AMIS 0.35?m A/D CMOS technology. Subject Capacitive transimpedance amplifiercorrelated double samplingactive pixel sensorIC-compatible microspectrometersLVOFvariable integration time To reference this document use: http://resolver.tudelft.nl/uuid:ef511dec-c68d-4104-9861-b3ddc25b14d3 Publisher SPIE ISSN 0277-786X Source Proceedings of SPIE, 2010, vol. 7726 Part of collection Institutional Repository Document type conference paper Rights (c)2010 Liu, C., Emadi, A., Wu, H., De Graaf, G., Wolfenbuttel, R.F. Files PDF CMOSLiu.pdf 4.45 MB Close viewer /islandora/object/uuid:ef511dec-c68d-4104-9861-b3ddc25b14d3/datastream/OBJ/view