Print Email Facebook Twitter Saddle-point construction in the design of lithographic objectives, part 1: Method Title Saddle-point construction in the design of lithographic objectives, part 1: Method Author Marinescu, O. Bociort, F. Faculty Applied Sciences Department Optics Research Group Date 2008-09-30 Subject saddle pointlithographyoptimizationoptical system designEUVDUV To reference this document use: http://resolver.tudelft.nl/uuid:f16b0c66-bef3-46f9-a84c-174c0e0bc449 Publisher SPIE ISSN 0091-3286 Source Optical engineering, 47.2008, nr. 9 Part of collection Institutional Repository Document type journal article Rights (c)2008 Marinescu, O., Bociort, F. Files PDF 20082.1Saddle.pdf 684.77 KB Close viewer /islandora/object/uuid:f16b0c66-bef3-46f9-a84c-174c0e0bc449/datastream/OBJ/view