Print Email Facebook Twitter Quantum Noise Effects in e-Beam Lithography and Metrology Title Quantum Noise Effects in e-Beam Lithography and Metrology Author Verduin, T. (TU Delft ImPhys/Charged Particle Optics) Contributor Kruit, P. (promotor) Hagen, C.W. (copromotor) Degree granting institution Delft University of Technology Date 2017-01-18 To reference this document use: https://doi.org/10.4233/uuid:f214f594-a21f-4318-9f29-9776d60ab06c ISBN 978-94-6186-782-7 Part of collection Institutional Repository Document type doctoral thesis Rights © 2017 T. Verduin Files PDF T._Verduin_Quantum_Noise_ ... rology.pdf 12.35 MB Close viewer /islandora/object/uuid:f214f594-a21f-4318-9f29-9776d60ab06c/datastream/OBJ/view