Print Email Facebook Twitter Laser-induced chemical vapour deposition of silicon carbonitride Title Laser-induced chemical vapour deposition of silicon carbonitride Author Besling, W.F.A. Van der Put, P.J.J.M. Schoonman, J. Battiston, G.A. Gerbasi, R. Porchia, M. Date 1995 Subject Experimental study Ternary compounds Silicon carbides Silicon nitrides Carbonitrides Crystal growth from vapors CVD Photosensitization Laser radiation Coatings Powders Ultrafine particle Amorphous state Characterization Operating mode Etude experimentale To reference this document use: http://resolver.tudelft.nl/uuid:f274152a-1a31-42b7-a131-02f5fd1d6c40 ISSN 1155-4339 Source EUROCVD 10: European conference on chemical vapour deposition, 10, Venice Italy, 1995-09-10 France English Analytic Serial; 5(5), 2. (1995) Part of collection Institutional Repository Document type conference paper Files PDF 862235.pdf 906.98 KB Close viewer /islandora/object/uuid:f274152a-1a31-42b7-a131-02f5fd1d6c40/datastream/OBJ/view