Print Email Facebook Twitter Helium-ion-beam-induced growth of 3-dimensional AFM probes Title Helium-ion-beam-induced growth of 3-dimensional AFM probes Author Nanda, G. (TU Delft QN/Kavli Nanolab Delft; Kavli institute of nanoscience Delft) Veldhoven, E. van (TNO) Maas, D. (TNO) Herfst, R. (TNO) Sadeghian Marnani, H. (TU Delft Computational Design and Mechanics; TNO) Alkemade, P.F.A. (TU Delft QN/Kavli Nanolab Delft; Kavli institute of nanoscience Delft) Date 2016 Subject 3D-AFMion beam induced depositionhelium ion microscopemetrology To reference this document use: http://resolver.tudelft.nl/uuid:f43d1657-5202-46ff-b829-9c7d8a756f9e Page numbers 105-106 Event 13th International Workshop on Nanomechanical Sensing, 2016-06-22 → 2016-06-24, Delft, Netherlands Part of collection Institutional Repository Document type abstract Rights © 2016 G. Nanda, E. van Veldhoven, D. Maas, R. Herfst, H. Sadeghian Marnani, P.F.A. Alkemade Files PDF Nanda.pdf 313.05 KB Close viewer /islandora/object/uuid:f43d1657-5202-46ff-b829-9c7d8a756f9e/datastream/OBJ/view