Print Email Facebook Twitter A Resistor-Based Temperature Sensor With a 0.13 pJ·K² Resolution FoM Title A Resistor-Based Temperature Sensor With a 0.13 pJ·K² Resolution FoM Author Pan, S. (TU Delft Electronic Instrumentation) Luo, Yanquan (University of Ulm) Heidary Shalmany, S. (TU Delft Electronic Instrumentation) Makinwa, K.A.A. (TU Delft Microelectronics) Department Microelectronics Date 2018 Abstract This paper describes a high-resolution energy-efficient CMOS temperature sensor, intended for the temperature compensation of MEMS/quartz frequency references. The sensor is based on silicided poly-silicon thermistors, which are embedded in a Wien-bridge RC filter. When driven at a fixed frequency, the filter exhibits a temperature-dependent phase shift, which is digitized by an energy-efficient continuous-time phase-domain delta-sigma modulator. Implemented in a 0.18-μm CMOS technology, the sensor draws 87 μA from a 1.8 V supply and achieves a resolution of 410 μKrms in a 5-ms conversion time. This translates into a state-of-the-art resolution figure-of-merit of 0.13 pJ·K². When packaged in ceramic, the sensor achieves an inaccuracy of 0.2 °C (3σ) from -40 °C to 85 °C after a single-point calibration and a correction for systematic nonlinearity. This can be reduced to ±0.03 °C (3σ) after a first-order fit. In addition, the sensor exhibits low 1/f noise and packaging shift. Subject CalibrationCMOS processCMOS temperature sensorcontinuous-time phase-domain delta-sigma modulator (PDΔΣM)energy efficiencyEnergy resolutionresistor-based sensorResistorsSignal resolutiontemperature compensationTemperature dependenceTemperature sensors To reference this document use: http://resolver.tudelft.nl/uuid:f54e54ce-a674-4bff-9355-d6b1f3f3ffc2 DOI https://doi.org/10.1109/JSSC.2017.2746671 Embargo date 2022-03-30 ISSN 0018-9200 Source IEEE Journal of Solid State Circuits, 53 (1), 164-173 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type journal article Rights © 2018 S. Pan, Yanquan Luo, S. Heidary Shalmany, K.A.A. Makinwa Files PDF A_Resistor_Based_Temperat ... on_FoM.pdf 2.98 MB Close viewer /islandora/object/uuid:f54e54ce-a674-4bff-9355-d6b1f3f3ffc2/datastream/OBJ/view