MEMS-based Linear Thermopile Detector Arrays for IR Microspectrometers

Title

MEMS-based Linear Thermopile Detector Arrays for IR Microspectrometers

Author

Wu, H.

Contributor

Meijer, G.C.M. (promotor)
Wolffenbuttel, R.F. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Date

2011-08-26

To reference this document use:

http://resolver.tudelft.nl/uuid:f5ff4f99-5c49-4351-9c8c-3793be124fa8

ISBN

9789461901026

Part of collection

Institutional Repository

Document type

doctoral thesis