Print Email Facebook Twitter Electrical actuation and frequency tuning of 2D mechanical resonators Title Electrical actuation and frequency tuning of 2D mechanical resonators Author Van Dorp, D.J.J. Contributor Van Leeuwen, R. (mentor) Faculty Applied Sciences Department Kavli Institute of Nanoscience Delft Programme Molecular electronics and devices Date 2015-04-02 Abstract The electrical actuation of suspended membrane nanomechanical resonators incorporated into a laser interferometer displacement setup was investigated. Graphene and MoS2 membranes have been used to show electrical actuation of both metals and semiconductors. The method to fabricate devices was optimized and the properties of the fabricated devices are documented in order to make future device farication easier when speci?c properties are required. The ?rst experiment performed with the electrical actuation was done in order to investigate the frequency tuning the of the 2D resonators. Resonance frequencies in the range of 15-55 MHz are observed without frequency tuning, where variations are due to differences in diameter and thickness of the suspended drums and the built-in tension. Applying a DC voltage caused both a decrease and an increase in the resonance frequency, depending on the device and the magnitude of the voltage. A maximum (increasing) frequency tuning sensitivity of 7.62 MHz/V was achieved. Furthermore, the model of interactions in 2D circular membrane due to electric actuation and DC gate voltage tuning in the linear resonator regime is compared to the measurement results. This comparison gives insight in the interaction between electrostatic spring softening and mechanically induced strain in membranes with different properties. The investigated model was insuf?cient to explain the measured frequency changes due to the applied DC voltages. Subject mechanical resonator2D materialsresonance frequency To reference this document use: http://resolver.tudelft.nl/uuid:fa6b9a8d-b559-4e3f-aa62-d0956c96cda8 Part of collection Student theses Document type master thesis Rights (c) 2015 Van Dorp, D.J.J. Files PDF Electrical_actuation_and_ ... nators.pdf 13.85 MB Close viewer /islandora/object/uuid:fa6b9a8d-b559-4e3f-aa62-d0956c96cda8/datastream/OBJ/view