Print Email Facebook Twitter Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates Title Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates Author Sajadi, B. (TU Delft Dynamics of Micro and Nano Systems) Alijani, F. (TU Delft Dynamics of Micro and Nano Systems) Goosen, J.F.L. (TU Delft Computational Design and Mechanics) van Keulen, A. (TU Delft Computational Design and Mechanics) Date 2017 Abstract Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order model based on an energy approach is formulated. It has been shown that nonlinear dynamics of an electrically actuated micro-plate, in the presence of differential pressure, significantly differs from those under purely electrostatic loads. The micro-plate may lose stability upon either saddle-node or period-doubling bifurcations. It has also been found that in the presence of a differential pressure, increasing the DC or AC voltages may surprisingly help to stabilize the motion of the micro-plate. Subject Dynamic pull-inElectrostaticInstabilityMEMSMicro-platePeriod-doubling To reference this document use: http://resolver.tudelft.nl/uuid:fea5f235-8a01-4cf2-bd45-1d26a577ca8b DOI https://doi.org/10.1007/s11071-017-4007-y ISSN 0924-090X Source Nonlinear Dynamics: an international journal of nonlinear dynamics and chaos in engineering systems, 91 (March 2018) (4), 2157-2170 Part of collection Institutional Repository Document type journal article Rights © 2017 B. Sajadi, F. Alijani, J.F.L. Goosen, A. van Keulen Files PDF 10.1007_2Fs11071_017_4007_y.pdf 2.36 MB Close viewer /islandora/object/uuid:fea5f235-8a01-4cf2-bd45-1d26a577ca8b/datastream/OBJ/view