Print Email Facebook Twitter Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating Title Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating Author Gkouzou, A. (TU Delft Micro and Nano Engineering) Kokorian, J. (TU Delft Micro and Nano Engineering) Janssen, G.C.A.M. (TU Delft Micro and Nano Engineering) van Spengen, W.M. (TU Delft Micro and Nano Engineering; Falco Systems) Date 2016 Abstract In this work, we have incorporated heaters in a MEMS device, which allow the in situ local heating of its contacting surfaces. This design offers a promising solution for MEMS devices with contacting components by preventing capillary-induced adhesion. The force of adhesion was assessed by optically measuring in-plane snap-off displacements. We were able to decrease adhesion from 500 nN to 200 nN with just one heated surface of which the temperature was set above 300 °C. The temperature should not be set too high: we observed increased adhesion due to a direct bonding process once the temperature was increased above 750 °C. Remarkably, adhesion increased by heating from room temperature to 75 °C, which is attributed to more water being transferred to the contact area due to faster kinetics. We observed the same effect in the cases where both surfaces were heated, although at slightly different temperatures. We demonstrated that heating only one surface to between 300 °C and 750 °C is sufficient to significantly lower adhesion, due to the removal of capillary menisci. The required heater is typically most easily implemented in a stationary part of the device. Subject MEMS deviceadhesionstictiondisplacementtemperaturemicro-Raman spectroscopycapillary condensation To reference this document use: http://resolver.tudelft.nl/uuid:ff6b86e0-4353-4d46-956d-fa32f36a1c5e DOI https://doi.org/10.1088/0960-1317/26/9/095020 ISSN 0960-1317 Source Journal of Micromechanics and Microengineering, 26 Part of collection Institutional Repository Document type journal article Rights © 2016 A. Gkouzou, J. Kokorian, G.C.A.M. Janssen, W.M. van Spengen Files PDF Gkouzou_2016_J._Micromech ... 095020.pdf 2.3 MB Close viewer /islandora/object/uuid:ff6b86e0-4353-4d46-956d-fa32f36a1c5e/datastream/OBJ/view