Graphene gas pumps

Graphene gas pumps

Davidovikj, D. (TU Delft QN/van der Zant Lab; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)
Bouwmeester, Damian (Student TU Delft; Kavli institute of nanoscience Delft)
van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft)
Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)

2018

We report on the development of a pneumatically coupled graphene membrane system, comprising of two circular cavities connected by a narrow trench. Both cavities and the trench are covered by a thin few-layer graphene membrane to form a sealed dumbbell-shaped chamber. Local electrodes at the bottom of each cavity allow for actuation of each membrane separately, enabling electrical control and manipulation of the gas flow inside the channel. Using laser interferometry, we measure the displacement of each drum at atmospheric pressure as a function of the frequency of the electrostatic driving force and provide a proof-of-principle of using graphene membranes to pump attolitre quantities of gases at the nanoscale.

gas pumps
graphene
nanomechanics
NEMS

http://resolver.tudelft.nl/uuid:ff6f6894-d79b-4eea-b97e-7c652ec37cd2

https://doi.org/10.1088/2053-1583/aac0a8

2018-11-11

2053-1583

2D Materials, 5 (3)

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

journal article

© 2018 D. Davidovikj, Damian Bouwmeester, H.S.J. van der Zant, P.G. Steeneken